Program Chair:
Sumit Agarwal (Colorado School of Mines, USA)
Program Co-Chair:
Dennis Hausmann (Lam Research, USA)
ALD Program Committee:
- Parag Banerjee (University of Central Florida, USA)
- Sean Barry (Carlton University, Canada)
- Stacey Bent (Standford University, USA)
- Haripin Chandra (Versum Materials, UK)
- Robert Clark (TEL, USA)
- Scott Clendenning (Intel, USA)
- Rong Chen (Huazhong University of Science and Technology, China)
- John F. Conley, Jr. (Oregon State University, USA)
- Arrelaine Dameron (Forge Nano, USA)
- Neil Dasgupta (University of Michigan, USA)
- Charles Dezelah (ASM Microchemistry, USA)
- Christophe Detavernier (University of Ghent, Belgium)
- Shi-Jin Ding (Fudan University, China)
- Christian Dussarrat (Air Liquide, France)
- Simon Elliott (Schrödinger, Ireland)
- Ravi Kanjolia (EMD Performance Materials, USA)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Mato Knez (Nanogune, Spain)
- Harm Knoops (Oxford Instruments, UK)
- Se-Hun Kwon (Pusan National University, South Korea)
- Adrien LaVoie (Lam Research, USA)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Won-Jun Lee (Sejong University, South Korea)
- Han-Jin Lim (Samsung Electronics, South Korea)
- Mike McSwiney (Intel, USA)
- Jin-Seong Park (Hanyang University, South Korea)
- Paul Poodt (TNO/Holst Center, The Netherlands)
- Matti Putkonen (VTT, Finland)
- Somil Rathi (Eugenus, USA)
- Mikko Ritala (University of Helsinki, Finland)
- Simon Rushworth (EpiValence, UK)
- Seung Wook Ryu (SK Hynix, South Korea)
- Uwe Schroeder (Namlab, Germany)
- Nicholas Strandwitz (Lehigh University, USA)
- Jonas Sundqvist (Fraunhofer IKTS, Germany)
- Ganesh Sundaram (Veeco, USA)
- Myung Mo Sung (Hanyang University, South Korea)
- Christophe Vallee (LETI-LTM, France)
- Charles Winter (Wayne State University, USA)
- Angel Yanguas-Gil (Argonne National Lab, USA)
ALD Poster Chairs:
- Adrie Mackus (Eindhoven University of Technology, The Netherlands)
- Virginia Wheeler (U.S. Naval Research Lab, USA)
ALD Social Media Chair:
- Riikka Puurunen (Aalto University, Finland)
ALD International Advisory Committee:
- Annelies Delabie (imec, Belgium)
- Anjana Devi (Ruhr-University Bochum, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Roy Gordon (Harvard University, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA)
ALE Program Chairs:
Program Chair:
Craig Huffman (Micron Technology, USA)
Program Co-Chair:
Gottlieb Oehrlein (University of Maryland, USA)
ALE Program Committee:
- Ankur Agarwal (KLA, USA)
- David Boris (Naval Research Lab, USA)
- Jean-Francois de Marneffe (imec, Belgium)
- Bert Ellingboe (Dublin City University, Ireland)
- Steve George (University of Colorado at Boulder, USA)
- Satoshi Hamaguchi (Osaka University, Japan)
- Keren Kanarik (Lam Research, USA)
- Harm Knoops (Oxford Instruments, The Netherlands)
- Venkat Pallem (Air Liquide, USA)
- Alok Ranjan (Tokyo Electron, USA)
- Fred Roozeboom (Eindhoven University of Technology, The Netherlands)
- Dmitry Suyatin (Lund University, Sweden)
- Tetsuya Tatsumi (Sony Corp., Japan)
- Wei Tian (Applied Materials, USA)
- Geun Young Yeom (Sungkyunkwan University, South Korea)
- Ishii Yohei (Hitachi High Technologies USA)
ALE Steering Committee:
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Steve George (University of Colorado at Boulder, USA)